
Published by Artechouse Substrate Surface Preparation is a practical, one-stop reference, covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits.
The hands-on resource offers detailed guidance in the entire substrate surface preparation process, from lapping and polishing to specialised techniques and surface finishing.
The book has over 125 illustrations, and the unique reference provides a complete understanding of important maintenance methods and the full range of equipment available in the field.
Rather than wasting time and money on a trial and error approach, gain the know-how and confidence to produce desired results when processing a sample of new material.
The book also presents in-depth discussions on key applications, such as optics production and semiconductor delamination and deconstruction.
Max Robertson with decades of industry experience and was most recently a development manager at Logitech which specialises in manufacturing the equipment described in this book. Robertson holds his B.Sc. in engineering from St. Andrews University.
